Study of the Adhesion Properties of the Electrode and the Piezoelectric Film-Type Sensor

Se-Gi Park & Hui-Yun Hwang
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Keywords: Adhesion, PVDF film, electrode
A b s t r a c t
PVDF film sensor embedded tactile sensing systems have been used due to their flexible and adaptable characteristics to curved surfaces. For reliable sensing, PVDF film sensor must be firmly fixed to a specific location of the substrate because the deformation of the substrate must be transmitted well to the PVDF film sensor. Therefore, adhesion of the substrate and the film sensor is an important factor. We implement adhesion test between the film and the electrode. The electrodes were fabricated on the film by plasma sputtering method. With gold and silver coated PVDF films, pull-off tests and SEM (Scanning Electron Microscope) were conducted to figure out the adhesion characteristics between the electrode and the film according to the type and thickness of the electrode. Adhesion strength between the electrode and PVDF films increased as the plasma sputtering duration increased and seems to be saturated to the certain value.

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